Planar refractive lenses made of SiC for high intensity nanofocusing.
Journal
Optics express
ISSN: 1094-4087
Titre abrégé: Opt Express
Pays: United States
ID NLM: 101137103
Informations de publication
Date de publication:
26 Apr 2021
26 Apr 2021
Historique:
entrez:
14
5
2021
pubmed:
15
5
2021
medline:
15
5
2021
Statut:
ppublish
Résumé
We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm×275 nm has been achieved with a lens working distance of 29 mm.
Identifiants
pubmed: 33985128
pii: 450387
doi: 10.1364/OE.416223
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM